Surface morphology of amorphous hydrocarbon thin films deposited in pulsed radiofrequency discharge

Page: s1529

M. Valtr, P. Klapetek, V. Buršíková, I. Ohlídal, D. Franta

2nd Central European Symposium on Plasma Chemistry, 31st August - 4th September 2008 Brno, Czech Republic

 

 

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